Germany in last four
Mats Hummels headed Germany into the World Cup's last four as his first-half goal sealed a 1-0 win over France in Friday's quarter-final at Brazil 2014.
The centre-back's powerful 12th-minute header at Rio de Janeiro's Maracana Stadium means Germany now face either Brazil or Colombia in Tuesday's semi-final at Belo Horizonte.
French coach Didier Deschamps, who captained Les Bleus to the 1998 triumph, suffered his first defeat in 11 World Cup games as either a player or trainer.
Seven of the German squad had suffered with mild flu in the build-up as Hummels retured to take Per Mertesacker's place at centre-back.
Miroslav Klose was prefered up front with Thomas Mueller switching to the right wing.
Deschamps made two changes from the side who beat Nigeria in the last 16 with centre-back Mamadou Sakho back after a hamstring complaint while Antoine Griezmann replaced Olivier Giroud.
Despite the Germans stranglehold on early possession, the first real chance came to Benzema, who fired wide after seven minutes. The Germans took the lead when Hummels, back in the side after missing Monday's win over Algeria with flu, rose highest to head Toni Kroos' free-kick. His bullet header smashed in off the crossbar to claim his second goal of Brazil 2014.
France's best chance came on 33 minutes when Mathieu Valbuena's shot was saved by Manuel Neuer and Benzema failed to control the follow-up, firing over the bar.
The French came close to being awarded a penalty just before the break when Benzema's header hit Hummels in the stomach, missing his hands by inches.
Sami Khedira earned a deserved booking for fouling Griezmann on 54 minutes as France enjoyed a good spell of pressure as centre-back Raphael Varane's header went straight to Neuer's grateful hands.
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